# RIE Cluster DRIE & Cryo Etch (ENAS-04) - PR1161740-3340-P

Awarded · Tender

**This opportunity has been awarded. Its page stays for reference.**

Similar open opportunities:

- [300 mm D2W hybrid bonding tool (IZM-131.1) - PR1254078-3460-P](https://inteliwert.com/tender/opp_X9N8KXFVJ30EW4EEE5991X8Y3A/300-mm-d2w-hybrid-bonding-tool-izm-131-1-pr1254078-3460-p)
- [Lieferung 5.280 m N2XS(FL)2 Y 1x630/35 mm² 6/10 kV](https://inteliwert.com/tender/opp_YKT08JKBQBP6ZJ667Z0C4VAS40/lieferung-5-280-m-n2xs-fl-2-y-1x630-35-mm-6-10-kv)
- [Fully automated in-line OCD and dimensional shape metrology system (IZM-133.3) - PR1320279-3460-P](https://inteliwert.com/tender/opp_F6SFM0JKMBGYVHZAJZ2ATZY7A2/fully-automated-in-line-ocd-and-dimensional-shape-metrology-system-izm-133-3-pr1)
- [Kauf von mobilen Stromerzeugern für die humanitäre Unterstützung der Ukraine](https://inteliwert.com/tender/opp_X34SZRZERQY4YE6W3WCE4RH60H/kauf-von-mobilen-stromerzeugern-fuer-die-humanitaere-unterstuetzung-der-ukraine)
- [Maengelabstellung Brandmeldeanlage BSZ Pirna - Elektroinstallation](https://inteliwert.com/tender/opp_NTYQEJMYMTR9WKKDPQ96EWY5HV/maengelabstellung-brandmeldeanlage-bsz-pirna-elektroinstallation)

## At a glance

Fraunhofer-Gesellschaft - Einkauf B12 is procuring Microelectronic machinery and apparatus (CPV 31712100) in Chemnitz, Kreisfreie Stadt (DED41). It has been awarded. Procedure type: Negotiated with prior publication of a call for competition / competitive with negotiation.

### From the notice

RIE Cluster DRIE & Cryo Etch (ENAS-04)

## Key facts

- Status: Awarded
- Deadline: No deadline in the notice
- Buyer: [Fraunhofer-Gesellschaft - Einkauf B12](https://inteliwert.com/company/org_ZQDDXG2RW7JW4DR7DGWS1RF0G2/fraunhofer-gesellschaft-zur-foerderung-der-angewandten-forsc), München, DE
- Place of performance: Chemnitz, Kreisfreie Stadt (DED41)
- Main CPV: Microelectronic machinery and apparatus (CPV 31712100)
- Procedure: Negotiated with prior publication of a call for competition / competitive with negotiation
- Lots: 1
- First published: 3 August 2026, 11:32 (UTC+02:00)

Source: [Official notice](https://oeffentlichevergabe.de/ui/de/notices/0f7bc8af-dca0-4519-a2c3-bab5d60a710a). Each fact is from the official notice, last checked 9 November 2026, 14:30 (UTC+01:00).

Fact sheet: [Inteliwert fact sheet: RIE Cluster DRIE & Cryo Etch (ENAS-04) - PR1161740-3340-P — Fraunhofer-Gesellschaft - Einkauf B12. A product of Bandpey GmbH.](https://inteliwert.com/cards/opp_0C4ZNW89S2E0KM7J3JNM3EN8GF/ntv_8REB8DGZBNDHTXDF5Z5FEJC8JX/en-sheet.png) (PNG, 1600 × 900)

## Lots (1)

### Lot LOT-0000: RIE Cluster DRIE & Cryo Etch (ENAS-04) - PR1161740-3340-P

1 pc. RIE Cluster DRIE & Cryo Etch

- CPV: Microelectronic machinery and apparatus (CPV 31712100)
- Place: Chemnitz, Kreisfreie Stadt (DED41)

## Timeline

- 3 August 2026, 11:32 (UTC+02:00): Award notice, Notice, version 01 (Contract or concession award notice – standard regime), [Official notice](https://oeffentlichevergabe.de/ui/de/notices/0f7bc8af-dca0-4519-a2c3-bab5d60a710a)
- 3 August 2026: Award. Winner: SENTECH Gesellschaft für Sensortechnik mbH; Tenders received: 1

## Classification

- CPV codes: Microelectronic machinery and apparatus (CPV 31712100)
- NUTS regions: Chemnitz, Kreisfreie Stadt (DED41)
- Other parties in the notice: SENTECH Gesellschaft für Sensortechnik mbH (Tenderer); SENTECH Gesellschaft für Sensortechnik mbH (Winner)

## Official documents

No documents found in the indexed notice.

## Questions and answers

### Who is the buyer?

Fraunhofer-Gesellschaft - Einkauf B12, München, DE.

### What is being procured (CPV)?

Microelectronic machinery and apparatus (CPV 31712100).

### Where is the work performed (NUTS)?

Chemnitz, Kreisfreie Stadt (DED41).

### Is it divided into lots?

No, the notice names a single lot.

### Which procedure is used?

Negotiated with prior publication of a call for competition / competitive with negotiation.

### How do I submit a bid?

On the official notice or the portal it names. Inteliwert does not submit bids. [Official notice](https://oeffentlichevergabe.de/ui/de/notices/0f7bc8af-dca0-4519-a2c3-bab5d60a710a)

### Am I eligible?

Inteliwert does not judge eligibility. The selection criteria are in the official notice. [Official notice](https://oeffentlichevergabe.de/ui/de/notices/0f7bc8af-dca0-4519-a2c3-bab5d60a710a)

## More from this buyer

Other published opportunities of this buyer in the indexed notices, open ones first.

- [multidisziplinäre Zitations- und Analysedatenbank - PR1273173-9789-I](https://inteliwert.com/tender/opp_0VPFJ8ZCVZGY3R7TPC96WK01Y6/multidisziplinaere-zitations-und-analysedatenbank-pr1273173-9789-i)  
  Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DE212 (Bayern) · Deadline: 11 Nov 2026, 09:00 (UTC+01:00) · [Official notice](https://ted.europa.eu/de/notice/-/detail/773072-2026), Last checked 7 Nov 2026, 07:11 (UTC+01:00)
- [Business-Notebook Rahmenvereinbarung - PR1248160-9782-I](https://inteliwert.com/tender/opp_ES0DQBDA8JQNB07SHSGCWN6ZP5/business-notebook-rahmenvereinbarung-pr1248160-9782-i)  
  Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DE212 (Bayern) · Deadline: 23 Nov 2026, 10:00 (UTC+01:00) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/0f995efc-c143-4a44-9d57-3ffcbc9e7f38), Last checked 6 Nov 2026, 16:30 (UTC+01:00)
- [Fully automated in-line OCD and dimensional shape metrology system (IZM-133.3) - PR1320279-3460-P](https://inteliwert.com/tender/opp_F6SFM0JKMBGYVHZAJZ2ATZY7A2/fully-automated-in-line-ocd-and-dimensional-shape-metrology-system-izm-133-3-pr1)  
  Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DED21 (Sachsen) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/5a637237-954b-47fa-9d5f-fc606c1d85e6), Last checked 6 Nov 2026, 07:11 (UTC+01:00)
- [Stromversorgungsanlagen 70-\[…\]a - PR1313999-2780-B](https://inteliwert.com/tender/opp_RSJG6R3RQCS4TPWM960PTJQDE4/stromversorgungsanlagen-70-00002-2780-407a-pr1313999-2780-b)  
  Open · Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau · Place: DE803 (Mecklenburg-Vorpommern) · Deadline: 15 Dec 2026, 10:00 (UTC+01:00) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/992730e1-e05a-4380-a6e0-63e782de27c2), Last checked 6 Nov 2026, 07:11 (UTC+01:00)
- [High Temperature 200 mm Ion Implanter - PR1293607-2790-W](https://inteliwert.com/tender/opp_SFNY4GY6RXPVF3MQCFKCWYT783/high-temperature-200-mm-ion-implanter-pr1293607-2790-w)  
  Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DE252 (Bayern) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/efb6064f-4833-426e-9b6a-1ef558dbbd82), Last checked 6 Nov 2026, 15:30 (UTC+01:00)

## Related opportunities

- [300 mm D2W hybrid bonding tool (IZM-131.1) - PR1254078-3460-P](https://inteliwert.com/tender/opp_X9N8KXFVJ30EW4EEE5991X8Y3A/300-mm-d2w-hybrid-bonding-tool-izm-131-1-pr1254078-3460-p)  
  Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DED2E (Sachsen) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/dd34a80c-20d5-4122-816d-7f4d1dcb4e18), Last checked 9 Nov 2026, 16:30 (UTC+01:00)
- [Lieferung 5.280 m N2XS(FL)2 Y 1x630/35 mm² 6/10 kV](https://inteliwert.com/tender/opp_YKT08JKBQBP6ZJ667Z0C4VAS40/lieferung-5-280-m-n2xs-fl-2-y-1x630-35-mm-6-10-kv)  
  Open · Buyer: eins energie in sachsen GmbH & Co. KG · Place: DED41 (Sachsen) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/0d7071a5-2a1d-4239-b652-e90248962ca1), Last checked 7 Nov 2026, 13:30 (UTC+01:00)
- [Umbau Lessing-Museum Kamenz 54/2026/rem, Los 60 Beleuchtung](https://inteliwert.com/tender/opp_4ZNKJ96MRWTWEDQV9A69AP94QQ/umbau-lessing-museum-kamenz-54-2026-rem-los-60-beleuchtung)  
  Open · Place: DED (Sachsen) · Deadline: 9 Nov 2026, 11:00 (UTC+01:00) (Deadline passed) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/a93c09fd19e13e5a), Last checked 6 Nov 2026, 17:31 (UTC+01:00)
- [Fully automated in-line OCD and dimensional shape metrology system (IZM-133.3) - PR1320279-3460-P](https://inteliwert.com/tender/opp_F6SFM0JKMBGYVHZAJZ2ATZY7A2/fully-automated-in-line-ocd-and-dimensional-shape-metrology-system-izm-133-3-pr1)  
  Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DED21 (Sachsen) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/5a637237-954b-47fa-9d5f-fc606c1d85e6), Last checked 6 Nov 2026, 07:11 (UTC+01:00)
- [Kauf von mobilen Stromerzeugern für die humanitäre Unterstützung der Ukraine](https://inteliwert.com/tender/opp_X34SZRZERQY4YE6W3WCE4RH60H/kauf-von-mobilen-stromerzeugern-fuer-die-humanitaere-unterstuetzung-der-ukraine)  
  Open · Buyer: Stadt Leipzig · Place: DED51 (Sachsen) · Deadline: 19 Nov 2026, 09:00 (UTC+01:00) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/318e8f85-018e-489b-9c10-c47431987914), Last checked 6 Nov 2026, 07:11 (UTC+01:00)
- [Maengelabstellung Brandmeldeanlage BSZ Pirna - Elektroinstallation](https://inteliwert.com/tender/opp_NTYQEJMYMTR9WKKDPQ96EWY5HV/maengelabstellung-brandmeldeanlage-bsz-pirna-elektroinstallation)  
  Open · Place: DED (Sachsen) · Deadline: 24 Nov 2026, 08:00 (UTC+01:00) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/1f0acc9717054b50), Last checked 4 Nov 2026, 05:30 (UTC+01:00)

## Source

- Publisher: Bekanntmachungsservice
- Licence: [CC0 1.0](https://creativecommons.org/publicdomain/zero/1.0/)
- Official notice: [https://oeffentlichevergabe.de/ui/de/notices/0f7bc8af-dca0-4519-a2c3-bab5d60a710a](https://oeffentlichevergabe.de/ui/de/notices/0f7bc8af-dca0-4519-a2c3-bab5d60a710a)
- Last checked: 9 November 2026, 14:30 (UTC+01:00)

The official notice is authoritative. Inteliwert shows what the notice states and links to it.

---

Page: https://inteliwert.com/tender/opp_0C4ZNW89S2E0KM7J3JNM3EN8GF/rie-cluster-drie-cryo-etch-enas-04-pr1161740-3340-p

Inteliwert is a product of Bandpey GmbH, an international data and AI software company in Munich, Germany, founded and led by Roozbeh Bandpey. Bandpey's products: Facthory, Emolysis, Copolly and Inteliwert.

Inteliwert on LinkedIn: https://www.linkedin.com/company/intelliwert, GitHub: https://github.com/inteliwertai.
