# Plasma-Ätzanlage - PR1241915-2270-W Awarded · Tender **This opportunity has been awarded. Its page stays for reference.** Similar open opportunities: - [123kV Messwandler](https://inteliwert.com/tender/opp_A7MHKN3TGA5B4X4RQKRD2ARCHW/123kv-messwandler) - [E-Spule\_bis\_123kV](https://inteliwert.com/tender/opp_1JKJH626SG7KFPVFVW5BG3YPHG/e-spule-bis-123kv) - [123kV Trenn- und Erdungsschalter](https://inteliwert.com/tender/opp_2S8WGE5GEQBPZEPEHGA3N2Y56P/123kv-trenn-und-erdungsschalter) - [Erdungstransformatoren\_bis\_36kV](https://inteliwert.com/tender/opp_45YWS620B44YTRA47E53BPY7A0/erdungstransformatoren-bis-36kv) - [Lieferung von einer 11kV Schaltanlage](https://inteliwert.com/tender/opp_0G7S6KMVXYFYS2NRJC8KFDE1ZF/lieferung-von-einer-11kv-schaltanlage) ## At a glance Fraunhofer-Gesellschaft, Einkauf B12 is procuring Semiconductors (CPV 31712330) in München, Landkreis (DE21H). It has been awarded. Procedure type: Negotiated without prior call for competition. ### From the notice Plasma-Ätzanlage ## Key facts - Status: Awarded - Deadline: No deadline in the notice - Buyer: [Fraunhofer-Gesellschaft, Einkauf B12](https://inteliwert.com/company/org_ZQDDXG2RW7JW4DR7DGWS1RF0G2/fraunhofer-gesellschaft-einkauf-b12), München, DE - Place of performance: München, Landkreis (DE21H) - Main CPV: Semiconductors (CPV 31712330) - Procedure: Negotiated without prior call for competition - Lots: 1 - First published: 17 September 2026, 09:08 (UTC+02:00) Source: [Official notice](https://oeffentlichevergabe.de/ui/de/notices/a10edbef-7a88-42db-a298-313aa122c0c1). Each fact is from the official notice, last checked 7 November 2026, 12:30 (UTC+01:00). Fact sheet: [Inteliwert fact sheet: Plasma-Ätzanlage - PR1241915-2270-W — Fraunhofer-Gesellschaft, Einkauf B12. A product of Bandpey GmbH.](https://inteliwert.com/cards/opp_VHKA46V27X7JTD6S4ND1F7ZYN7/ntv_SEQD427ND97ZSEFPHS7T4MW6JN/en-sheet.png) (PNG, 1600 × 900) ## Lots (1) ### Lot LOT-0000: Plasma-Ätzanlage - PR1241915-2270-W Many areas of semiconductors, MEMS, and 3D integration technologies - such as microfluidics, physical, optical, and chemical sensors, and emerging quantum mechanical devices such as so-called Qubits and their integration into silicon substrates - utilize the excellent properties of silicon. In particular, high-precision structuring methods have been developed for these applications. Micro- and nanochannels, membranes, valves, cantilevers, and through-silicon vias are manufactured using Si deep reactive ion etching (Si-DRIE) technology. As a standard etching gas, SF6 is employed in Silicon Deep Reactive Ion Etching (Si-DRIE) processes. SF6 is a potent greenhouse gas with a high global warming potential (GWP) of 25.300 CO2-equivalents. Although the semiconductor industry currently benefits from an exemption regarding SF6 usage, the duration of this exemption remains uncertain. Consequently, the identification of alternative gases to replace SF6 is becoming more important. One promising alternative is F2 gas mixtures. However, their implementation requires specialized modifications to both gas infrastructure and process kits. Hence, in addition to its fluorine compatibility, the requirements for the novel etching system should include scalability and a minimized process chamber volume compared to conventional plasma etching systems. This reduction in chamber volume decreases the total gas flow required, thereby enabling nearly complete gas utilization while minimizing gas-wall interactions. Consequently, faster gas switching times can be achieved in Bosch processes. A key feature of this new developed etching system is its "Green Production" concept, which focuses on the minimization and prevention of environmentally harmful gases. Furthermore, the system enables straightforward scaling of substrate sizes from 150 mm to 200 mm. - CPV: Semiconductors (CPV 31712330) - Place: München, Landkreis (DE21H) ## Timeline - 17 September 2026, 09:08 (UTC+02:00): Award notice, Notice, version 01 (Contract or concession award notice – standard regime), [Official notice](https://oeffentlichevergabe.de/ui/de/notices/a10edbef-7a88-42db-a298-313aa122c0c1) - 15 September 2026: Award. Winner: HQ-Dielectrics GmbH; Tenders received: 1 ## Classification - CPV codes: Semiconductors (CPV 31712330) - NUTS regions: München, Landkreis (DE21H) - Other parties in the notice: HQ-Dielectrics GmbH (Tenderer); HQ-Dielectrics GmbH (Winner) ## Official documents No documents found in the indexed notice. ## Questions and answers ### Who is the buyer? Fraunhofer-Gesellschaft, Einkauf B12, München, DE. ### What is being procured (CPV)? Semiconductors (CPV 31712330). ### Where is the work performed (NUTS)? München, Landkreis (DE21H). ### Is it divided into lots? No, the notice names a single lot. ### Which procedure is used? Negotiated without prior call for competition. ### How do I submit a bid? On the official notice or the portal it names. Inteliwert does not submit bids. [Official notice](https://oeffentlichevergabe.de/ui/de/notices/a10edbef-7a88-42db-a298-313aa122c0c1) ### Am I eligible? Inteliwert does not judge eligibility. The selection criteria are in the official notice. [Official notice](https://oeffentlichevergabe.de/ui/de/notices/a10edbef-7a88-42db-a298-313aa122c0c1) ## More from this buyer Other published opportunities of this buyer in the indexed notices, open ones first. - [multidisziplinäre Zitations- und Analysedatenbank - PR1273173-9789-I](https://inteliwert.com/tender/opp_0VPFJ8ZCVZGY3R7TPC96WK01Y6/multidisziplinaere-zitations-und-analysedatenbank-pr1273173-9789-i) Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DE212 (Bayern) · Deadline: 11 Nov 2026, 09:00 (UTC+01:00) · [Official notice](https://ted.europa.eu/de/notice/-/detail/773072-2026), Last checked 7 Nov 2026, 07:11 (UTC+01:00) - [Business-Notebook Rahmenvereinbarung - PR1248160-9782-I](https://inteliwert.com/tender/opp_ES0DQBDA8JQNB07SHSGCWN6ZP5/business-notebook-rahmenvereinbarung-pr1248160-9782-i) Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DE212 (Bayern) · Deadline: 23 Nov 2026, 10:00 (UTC+01:00) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/0f995efc-c143-4a44-9d57-3ffcbc9e7f38), Last checked 6 Nov 2026, 16:30 (UTC+01:00) - [Fully automated in-line OCD and dimensional shape metrology system (IZM-133.3) - PR1320279-3460-P](https://inteliwert.com/tender/opp_F6SFM0JKMBGYVHZAJZ2ATZY7A2/fully-automated-in-line-ocd-and-dimensional-shape-metrology-system-izm-133-3-pr1) Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DED21 (Sachsen) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/5a637237-954b-47fa-9d5f-fc606c1d85e6), Last checked 6 Nov 2026, 07:11 (UTC+01:00) - [Stromversorgungsanlagen 70-\[…\]a - PR1313999-2780-B](https://inteliwert.com/tender/opp_RSJG6R3RQCS4TPWM960PTJQDE4/stromversorgungsanlagen-70-00002-2780-407a-pr1313999-2780-b) Open · Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau · Place: DE803 (Mecklenburg-Vorpommern) · Deadline: 15 Dec 2026, 10:00 (UTC+01:00) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/992730e1-e05a-4380-a6e0-63e782de27c2), Last checked 6 Nov 2026, 07:11 (UTC+01:00) - [High Temperature 200 mm Ion Implanter - PR1293607-2790-W](https://inteliwert.com/tender/opp_SFNY4GY6RXPVF3MQCFKCWYT783/high-temperature-200-mm-ion-implanter-pr1293607-2790-w) Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DE252 (Bayern) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/efb6064f-4833-426e-9b6a-1ef558dbbd82), Last checked 6 Nov 2026, 15:30 (UTC+01:00) ## Related opportunities - [123kV Messwandler](https://inteliwert.com/tender/opp_A7MHKN3TGA5B4X4RQKRD2ARCHW/123kv-messwandler) Open · Buyer: Thüga AG · Place: DE212 (Bayern) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/6d8a78c0-0ea4-421c-83f4-c71e19b1aebd), Last checked 8 Nov 2026, 01:30 (UTC+01:00) - [E-Spule\_bis\_123kV](https://inteliwert.com/tender/opp_1JKJH626SG7KFPVFVW5BG3YPHG/e-spule-bis-123kv) Open · Buyer: Thüga AG · Place: DE212 (Bayern) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/50979403-329b-4898-a5e3-cb09882453e5), Last checked 7 Nov 2026, 13:30 (UTC+01:00) - [123kV Trenn- und Erdungsschalter](https://inteliwert.com/tender/opp_2S8WGE5GEQBPZEPEHGA3N2Y56P/123kv-trenn-und-erdungsschalter) Open · Buyer: Thüga AG · Place: DE212 (Bayern) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/dc7c9efd-1fe5-4f6a-a0ec-d564528a3b1c), Last checked 7 Nov 2026, 13:30 (UTC+01:00) - [Erdungstransformatoren\_bis\_36kV](https://inteliwert.com/tender/opp_45YWS620B44YTRA47E53BPY7A0/erdungstransformatoren-bis-36kv) Open · Buyer: Thüga AG · Place: DE212 (Bayern) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/e26bcafa-6f08-4eb3-aec0-10ec7d7a1bff), Last checked 7 Nov 2026, 12:30 (UTC+01:00) - [Lieferung von einer 11kV Schaltanlage](https://inteliwert.com/tender/opp_0G7S6KMVXYFYS2NRJC8KFDE1ZF/lieferung-von-einer-11kv-schaltanlage) Open · Buyer: Regensburg Netz GmbH · Place: DE232 (Bayern) · Published value: €2,500,000 excl. VAT · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/02b6e51e-d2b9-409a-80d0-04b5eff03cb8), Last checked 6 Nov 2026, 15:30 (UTC+01:00) - [LL 20kV Schaltanlage Garagenstation](https://inteliwert.com/tender/opp_9HGSFCB25FGY60RHR4BBBSVW1G/ll-20kv-schaltanlage-garagenstation) Open · Buyer: Regensburg Netz GmbH · Place: DE232 (Bayern) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/8164ebac-428b-4c0d-a8ad-de9315dda438), Last checked 6 Nov 2026, 07:11 (UTC+01:00) ## Source - Publisher: Bekanntmachungsservice - Licence: [CC0 1.0](https://creativecommons.org/publicdomain/zero/1.0/) - Official notice: [https://oeffentlichevergabe.de/ui/de/notices/a10edbef-7a88-42db-a298-313aa122c0c1](https://oeffentlichevergabe.de/ui/de/notices/a10edbef-7a88-42db-a298-313aa122c0c1) - Last checked: 7 November 2026, 12:30 (UTC+01:00) The official notice is authoritative. Inteliwert shows what the notice states and links to it. --- Page: https://inteliwert.com/tender/opp_VHKA46V27X7JTD6S4ND1F7ZYN7/plasma-aetzanlage-pr1241915-2270-w Inteliwert is a product of Bandpey GmbH, an international data and AI software company in Munich, Germany, founded and led by Roozbeh Bandpey. Bandpey's products: Facthory, Emolysis, Copolly and Inteliwert. Inteliwert on LinkedIn: https://www.linkedin.com/company/intelliwert, GitHub: https://github.com/inteliwertai.