# Clustertool for Ion Beam Etching of 300mm wafers Awarded · Tender **This opportunity has been awarded. Its page stays for reference.** Similar open opportunities: - [Vacuum probing system (ENAS-11.1.2) - PR1211957-3340-P](https://inteliwert.com/tender/opp_3FZPW9AR9M7PS36YDHQHT5Z8F8/vacuum-probing-system-enas-11-1-2-pr1211957-3340-p) - [System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) - PR1153448-2480-P](https://inteliwert.com/tender/opp_SWWSCMESDYVKGCQV7GA38BBF15/system-for-high-apect-ratio-etch-consisting-of-mainframe-and-process-chambers-ip) - [Lieferung einer Hochgeschwindigkeitspresse](https://inteliwert.com/tender/opp_9D25E34JYJM1YJ4XTZJWYY2SEX/lieferung-einer-hochgeschwindigkeitspresse) - [Lieferung, Montage und Inbetriebnahme einer CNC-Bettfräsmaschine](https://inteliwert.com/tender/opp_X7YFWZGBA5WKCHNAJ7Y7M9MT85/lieferung-montage-und-inbetriebnahme-einer-cnc-bettfraesmaschine) - [Herstellung und Lieferung 6-Walzen-Technikumskalander](https://inteliwert.com/tender/opp_YWFCTF9RNE0EQXPBHKRAG8GG17/herstellung-und-lieferung-6-walzen-technikumskalander) ## At a glance Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. is procuring Miscellaneous general and special-purpose machinery (CPV 42900000) in Dresden, Kreisfreie Stadt (DED21). It has been awarded. Procedure type: Negotiated with prior publication of a call for competition / competitive with negotiation. ### From the notice The tender item is an ion beam etching process tool to be used for 300mm wafer fabrication at the FRAUNHOFER IPMS. The systems will be used for the processing of CMOS wafers in a cleanroom class 1000 (approximately class 6 EN ISO 14644-1) production environment. Therefore, it is necessary to fulfill require-ments regarding metal contamination and particle generation compatible with industry standards. ## Key facts - Status: Awarded - Deadline: No deadline in the notice - Buyer: [Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.](https://inteliwert.com/company/org_HK8GZCEXV4NRQ8XS18N5K6049E/fraunhofer-gesellschaft-zur-foerderung-der-angewandten-forsc), Erlangen, DE - Place of performance: Dresden, Kreisfreie Stadt (DED21) - Main CPV: Miscellaneous general and special-purpose machinery (CPV 42900000) - Procedure: Negotiated with prior publication of a call for competition / competitive with negotiation - Lots: 1 - First published: 8 July 2026, 13:50 (UTC+02:00) Source: [Official notice](https://oeffentlichevergabe.de/ui/de/notices/8d5c5fcb-fad2-45ef-bc2f-90c6365fb076). Each fact is from the official notice, last checked 10 November 2026, 16:30 (UTC+01:00). Fact sheet: [Inteliwert fact sheet: Clustertool for Ion Beam Etching of 300mm wafers — Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.. A product of Bandpey GmbH.](https://inteliwert.com/cards/opp_WSDVWR4F6PDMQQ22F302GZFEEN/ntv_EXM3KKNSQ51M0JSGK6Z7JJKNMG/en-sheet.png) (PNG, 1600 × 900) ## Lots (1) ### Lot LOT-0001: Clustertool for Ion Beam Etching of 300mm wafers The tender item is an ion beam etching process tool to be used for 300mm wafer fabrication at the FRAUNHOFER IPMS. The systems will be used for the processing of CMOS wafers in a cleanroom class 1000 (approximately class 6 EN ISO 14644-1) production environment. Therefore, it is necessary to fulfill require-ments regarding metal contamination and particle generation compatible with industry standards. - CPV: Miscellaneous general and special-purpose machinery (CPV 42900000) - Place: Dresden, Kreisfreie Stadt (DED21) ## Timeline - 8 July 2026, 13:50 (UTC+02:00): Award notice, Notice, version 02 (Contract or concession award notice – standard regime), [Official notice](https://oeffentlichevergabe.de/ui/de/notices/8d5c5fcb-fad2-45ef-bc2f-90c6365fb076) - 2 July 2026: Award. Winner: Scia Systems GmbH; Award value: €1 excl. VAT; Tenders received: 1 ## Classification - CPV codes: Miscellaneous general and special-purpose machinery (CPV 42900000) - NUTS regions: Dresden, Kreisfreie Stadt (DED21) - Other parties in the notice: Scia Systems GmbH (Tenderer); Scia Systems GmbH (Winner) ## Official documents No documents found in the indexed notice. ## Questions and answers ### Who is the buyer? Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V., Erlangen, DE. ### What is being procured (CPV)? Miscellaneous general and special-purpose machinery (CPV 42900000). ### Where is the work performed (NUTS)? Dresden, Kreisfreie Stadt (DED21). ### Is it divided into lots? No, the notice names a single lot. ### Which procedure is used? Negotiated with prior publication of a call for competition / competitive with negotiation. ### How do I submit a bid? On the official notice or the portal it names. Inteliwert does not submit bids. [Official notice](https://oeffentlichevergabe.de/ui/de/notices/8d5c5fcb-fad2-45ef-bc2f-90c6365fb076) ### Am I eligible? Inteliwert does not judge eligibility. The selection criteria are in the official notice. [Official notice](https://oeffentlichevergabe.de/ui/de/notices/8d5c5fcb-fad2-45ef-bc2f-90c6365fb076) ## More from this buyer Other published opportunities of this buyer in the indexed notices, open ones first. - [PR1260373 - Entwicklung einer Web-Plattform für den Betrieb produktnaher Audioanwendungen](https://inteliwert.com/tender/opp_FNE17JCYQ1AYNSNXC28QZ28YAZ/pr1260373-entwicklung-einer-web-plattform-fuer-den-betrieb-produktnaher-audioanw) Open · Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. · Place: DE252 (Bayern) · Deadline: 30 Nov 2026, 11:00 (UTC+01:00) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/568c31e6-6256-42ab-b642-16191915ebb3), Last checked 4 Nov 2026, 13:10 (UTC+01:00) - [VMWare Speicher inkl. Support](https://inteliwert.com/tender/opp_0RYAS8PGXVA92SMCFZSTHE9C1H/vmware-speicher-inkl-support) Awarded · Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. 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V. · Place: DE252 (Bayern) · Deadline: 2 Nov 2026, 10:00 (UTC+01:00) (Deadline passed) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/af2b3640-743d-47f1-8a14-905a71c4650e), Last checked 6 Nov 2026, 22:30 (UTC+01:00) ## Related opportunities - [Vacuum probing system (ENAS-11.1.2) - PR1211957-3340-P](https://inteliwert.com/tender/opp_3FZPW9AR9M7PS36YDHQHT5Z8F8/vacuum-probing-system-enas-11-1-2-pr1211957-3340-p) Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DED41 (Sachsen) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/1943597b-0313-4920-a115-3e3d6afaac2a), Last checked 10 Nov 2026, 08:30 (UTC+01:00) - [System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) - PR1153448-2480-P](https://inteliwert.com/tender/opp_SWWSCMESDYVKGCQV7GA38BBF15/system-for-high-apect-ratio-etch-consisting-of-mainframe-and-process-chambers-ip) Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DED21 (Sachsen) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/8a49c91c-d59f-43b4-a51b-e980aba81b16), Last checked 10 Nov 2026, 08:30 (UTC+01:00) - [Lieferung einer Hochgeschwindigkeitspresse](https://inteliwert.com/tender/opp_9D25E34JYJM1YJ4XTZJWYY2SEX/lieferung-einer-hochgeschwindigkeitspresse) Open · Buyer: Technische Universität Chemnitz · Place: DED41 (Sachsen) · Deadline: 7 Dec 2026, 12:00 (UTC+01:00) · [Official notice](https://ted.europa.eu/de/notice/-/detail/778476-2026), Last checked 10 Nov 2026, 07:11 (UTC+01:00) - [Lieferung, Montage und Inbetriebnahme einer CNC-Bettfräsmaschine](https://inteliwert.com/tender/opp_X7YFWZGBA5WKCHNAJ7Y7M9MT85/lieferung-montage-und-inbetriebnahme-einer-cnc-bettfraesmaschine) Open · Buyer: Dresdner Verkehrsbetriebe AG · Place: DED21 (Sachsen) · [Official notice](https://ted.europa.eu/de/notice/-/detail/777341-2026), Last checked 10 Nov 2026, 07:11 (UTC+01:00) - [Herstellung und Lieferung 6-Walzen-Technikumskalander](https://inteliwert.com/tender/opp_YWFCTF9RNE0EQXPBHKRAG8GG17/herstellung-und-lieferung-6-walzen-technikumskalander) Open · Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. · Place: DED21 (Sachsen) · Published value: €881,000 excl. VAT · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/f946a4b3-943f-470c-b576-e4868ebe0385), Last checked 10 Nov 2026, 00:30 (UTC+01:00) - [D2W Bonder (ENAS-07.1) - PR1221208-3340-P](https://inteliwert.com/tender/opp_A35MWS1JW6G09N23AF6C00X200/d2w-bonder-enas-07-1-pr1221208-3340-p) Open · Buyer: Fraunhofer-Gesellschaft - Einkauf B12 · Place: DED41 (Sachsen) · [Official notice](https://oeffentlichevergabe.de/ui/de/notices/6236b25e-9849-488b-bf63-97b7311c86db), Last checked 9 Nov 2026, 18:30 (UTC+01:00) ## Source - Publisher: Bekanntmachungsservice - Licence: [CC0 1.0](https://creativecommons.org/publicdomain/zero/1.0/) - Official notice: [https://oeffentlichevergabe.de/ui/de/notices/8d5c5fcb-fad2-45ef-bc2f-90c6365fb076](https://oeffentlichevergabe.de/ui/de/notices/8d5c5fcb-fad2-45ef-bc2f-90c6365fb076) - Last checked: 10 November 2026, 16:30 (UTC+01:00) The official notice is authoritative. Inteliwert shows what the notice states and links to it. --- Page: https://inteliwert.com/tender/opp_WSDVWR4F6PDMQQ22F302GZFEEN/clustertool-for-ion-beam-etching-of-300mm-wafers Inteliwert is a product of Bandpey GmbH, an international data and AI software company in Munich, Germany, founded and led by Roozbeh Bandpey. Bandpey's products: Facthory, Emolysis, Copolly and Inteliwert. Inteliwert on LinkedIn: https://www.linkedin.com/company/intelliwert, GitHub: https://github.com/inteliwertai.