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Plasma Ashing System
At a glance
Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften is procuring Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000) in München, Landkreis (DE21H). It is closed. Procedure type: Open.
From the notice
The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for automated operation, i.e., the hardware components have to be equipped with appropriate interfaces for computer connection.
Key facts
Each fact is from the official notice, last checked 26 October 2026, 15:47 (UTC+01:00).
- Status
- ClosedOfficial notice · checked 26 Oct 2026, 15:47 (UTC+01:00)
- Deadline
- No deadline in the noticeOfficial notice · checked 26 Oct 2026, 15:47 (UTC+01:00)
- Buyer
- Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften, Garching, DEOfficial notice · checked 26 Oct 2026, 15:47 (UTC+01:00)
- Place of performance
- München, Landkreis (DE21H)Official notice · checked 26 Oct 2026, 15:47 (UTC+01:00)
- Main CPV
- Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000)Official notice · checked 26 Oct 2026, 15:47 (UTC+01:00)
- Procedure
- OpenOfficial notice · checked 26 Oct 2026, 15:47 (UTC+01:00)
- Lots
- 1Official notice · checked 26 Oct 2026, 15:47 (UTC+01:00)
- First published
- 23 October 2026, 14:37 (UTC+02:00)Official notice · checked 26 Oct 2026, 15:47 (UTC+01:00)
Fact sheet
Lots (1)
Lot LOT-0001: Plasma Ashing System
siehe Leistungsbeschreibung.
Timeline
- 23 October 2026, 14:37 (UTC+02:00): Award notice Notice, version 01 (Contract or concession award notice – standard regime). Official notice
Buyer and place
Buyer
Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften
Garching, DE
Place of performance
- München, Landkreis (DE21H)
Classification
CPV codes
- 38000000: Laboratory, optical and precision equipments (excl. glasses)
NUTS regions
- DE21H: München, Landkreis
Official documents
No documents found in the indexed notice.
Questions and answers
Who is the buyer?
Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften, Garching, DE.
What is being procured (CPV)?
Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000).
Where is the work performed (NUTS)?
München, Landkreis (DE21H).
Is it divided into lots?
No, the notice names a single lot.
Which procedure is used?
Open.
How do I submit a bid?
On the official notice or the portal it names. Inteliwert does not submit bids. Official notice
Am I eligible?
Inteliwert does not judge eligibility. The selection criteria are in the official notice. Official notice
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Source
- Publisher
- Bekanntmachungsservice
- Licence
- CC0 1.0
- Last checked
- 26 October 2026, 15:47 (UTC+01:00)
The official notice is authoritative. Inteliwert shows what the notice states and links to it.