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200 mm Semi-Automatic RF Probe System for On-Wafer Measurements up to 250 GHz
At a glance
IHP GmbH - Leibniz-Institut für innovative Mikroelektronik is procuring Instruments for measuring electrical quantities (CPV 38341300) in Frankfurt (Oder), Kreisfreie Stadt (DE403). It has been awarded. Procedure type: Open.
Key facts
Each fact is from the official notice, last checked 6 November 2026, 16:30 (UTC+01:00).
- Status
- AwardedOfficial notice · checked 6 Nov 2026, 16:30 (UTC+01:00)
- Deadline
- No deadline in the noticeOfficial notice · checked 6 Nov 2026, 16:30 (UTC+01:00)
- Buyer
- IHP GmbH - Leibniz-Institut für innovative Mikroelektronik, Frankfurt (Oder), DEOfficial notice · checked 6 Nov 2026, 16:30 (UTC+01:00)
- Place of performance
- Frankfurt (Oder), Kreisfreie Stadt (DE403)Official notice · checked 6 Nov 2026, 16:30 (UTC+01:00)
- Main CPV
- Instruments for measuring electrical quantities (CPV 38341300)Official notice · checked 6 Nov 2026, 16:30 (UTC+01:00)
- Procedure
- OpenOfficial notice · checked 6 Nov 2026, 16:30 (UTC+01:00)
- Lots
- 1Official notice · checked 6 Nov 2026, 16:30 (UTC+01:00)
- First published
- 6 October 2026, 14:50 (UTC+02:00)Official notice · checked 6 Nov 2026, 16:30 (UTC+01:00)
Fact sheet

Lots (1)
Lot LOT-0001: 200 mm Semi-Automatic RF Probe System for On-Wafer Measurements up to 250 GHz
- Semi-automated 200 mm probe system for on-wafer measurements - Integrated controlled dry atmosphere to prevent condensation and ice formation during measurements below ambient temperature - System design with a defined interface architecture enabling integration of optional thermal chucks through standardized mechanical, electrical, and software interfaces - Automatic wafer size recognition (150 mm, 200 mm wafers and individual dies down to 5 × 5 mm) - Precision XY stage: minimum travel range 310 × 310 mm, repeatability < 1.0 µm, accuracy < 2.0 µm - Precision Z stage: minimum travel range 30 mm, repeatability < 1.0 µm, accuracy < 2.0 µm - Theta axis: ±5°, resolution ? 0.0001° - Controlled contact mechanism with repeatability ? 1 µm - Integrated vibration isolation and leveling table - Central operator console for control of all axes and system functions - Integrated keyboard and mouse tray - Power supply: 100-240 V AC, 50/60 Hz
Timeline
- 28 August 2026: Award. Winner: ATV Systems GmbH; Award value: €189,900 excl. VAT; Tenders received: 1; Lot LOT-0001.
- 6 October 2026, 14:50 (UTC+02:00): Award notice Notice, version 01 (Contract or concession award notice – standard regime). Official notice
Buyer and place
Buyer
IHP GmbH - Leibniz-Institut für innovative Mikroelektronik
Frankfurt (Oder), DE
Place of performance
- Frankfurt (Oder), Kreisfreie Stadt (DE403)
Other parties in the notice
- ATV Systems GmbH (Tenderer), Dresden
- ATV Systems GmbH (Winner), Dresden
Classification
CPV codes
- 38341300: Instruments for measuring electrical quantities
- 38540000: Machines and apparatus for testing and measuring
NUTS regions
- DE403: Frankfurt (Oder), Kreisfreie Stadt
Official documents
No documents found in the indexed notice.
Questions and answers
Who is the buyer?
IHP GmbH - Leibniz-Institut für innovative Mikroelektronik, Frankfurt (Oder), DE.
What is being procured (CPV)?
Instruments for measuring electrical quantities (CPV 38341300) and Machines and apparatus for testing and measuring (CPV 38540000).
Where is the work performed (NUTS)?
Frankfurt (Oder), Kreisfreie Stadt (DE403).
Is it divided into lots?
No, the notice names a single lot.
Which procedure is used?
Open.
How do I submit a bid?
On the official notice or the portal it names. Inteliwert does not submit bids. Official notice
Am I eligible?
Inteliwert does not judge eligibility. The selection criteria are in the official notice. Official notice
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Source
- Publisher
- Bekanntmachungsservice
- Licence
- CC0 1.0
- Last checked
- 6 November 2026, 16:30 (UTC+01:00)
The official notice is authoritative. Inteliwert shows what the notice states and links to it.