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Ätzanlage zum tiefen Silicium-Ätzen für MEMS

At a glance

Ruhr-Universität Bochum is procuring Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000) in Bochum, Kreisfreie Stadt (DEA51). The notice states an estimated value of €1,024,000 excl. VAT. Procedure type: Competitive dialogue.

From the notice

Die Ruhr-Universität Bochum beabsichtigt eine DRIE Ätzanlage zu beschaffen, die im Forschungslabor Mikroelektronik Bochum für Wafer-Substrate bis 200 mm Durchmesser eingesetzt werden soll. Sie soll auf dem Gebiet der Silicium-basierten Mikro-Elektro-Mechanischen Systeme (MEMS) für das tiefe anisotrope Siliciumätzen auf Basis eines zyklischen Ätzprozesses (DRIE, "BOSCH-Prozess") eingesetzt werden und darüber hinaus der Erforschung neuer Ätzkonzepte dienen, die weniger klimaschädliche Ätzgase nutzen.

Key facts

Each fact is from the official notice, last checked 9 November 2026, 04:31 (UTC+01:00).

Status
OpenOfficial notice · checked 9 Nov 2026, 04:31 (UTC+01:00)
Deadline
No deadline in the noticeOfficial notice · checked 9 Nov 2026, 04:31 (UTC+01:00)
Published value
€1,024,000 excl. VATOfficial notice · checked 9 Nov 2026, 04:31 (UTC+01:00)
Buyer
Ruhr-Universität Bochum, Bochum, DEOfficial notice · checked 9 Nov 2026, 04:31 (UTC+01:00)
Place of performance
Bochum, Kreisfreie Stadt (DEA51)Official notice · checked 9 Nov 2026, 04:31 (UTC+01:00)
Main CPV
Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000)Official notice · checked 9 Nov 2026, 04:31 (UTC+01:00)
Procedure
Competitive dialogueOfficial notice · checked 9 Nov 2026, 04:31 (UTC+01:00)
Lots
1Official notice · checked 9 Nov 2026, 04:31 (UTC+01:00)
First published
12 August 2026, 09:47 (UTC+02:00)Official notice · checked 9 Nov 2026, 04:31 (UTC+01:00)

Fact sheet

Inteliwert fact sheet: Ätzanlage zum tiefen Silicium-Ätzen für MEMS — Ruhr-Universität Bochum. A product of Bandpey GmbH.
The key facts of this page as an image (PNG, 1600 × 900), made from the official notice. © Bandpey GmbH; terms of use. Download the fact sheet

Lots (1)

  1. Lot LOT-0001: Ätzanlage zum tiefen Silicium-Ätzen für MEMS

    Die Ruhr-Universität Bochum beabsichtigt eine DRIE Ätzanlage zu beschaffen, die im Forschungslabor Mikroelektronik Bochum für Wafer-Substrate bis 200 mm Durchmesser eingesetzt werden soll. Sie soll auf dem Gebiet der Silicium-basierten Mikro-Elektro-Mechanischen Systeme (MEMS) für das tiefe anisotrope Siliciumätzen auf Basis eines zyklischen Ätzprozesses (DRIE, "BOSCH-Prozess") eingesetzt werden und darüber hinaus der Erforschung neuer Ätzkonzepte dienen, die weniger klimaschädliche Ätzgase nutzen.

    CPV
    Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000)
    Place
    Bochum, Kreisfreie Stadt (DEA51)

Timeline

  1. 12 August 2026, 09:47 (UTC+02:00): Original notice Notice, version 01 (Contract or concession notice – standard regime). Official notice

Buyer and place

Buyer

Ruhr-Universität Bochum
Bochum, DE

Place of performance

  • Bochum, Kreisfreie Stadt (DEA51)

Classification

CPV codes

  • 38000000: Laboratory, optical and precision equipments (excl. glasses)

NUTS regions

  • DEA51: Bochum, Kreisfreie Stadt

Official documents

Links go to the publisher. Inteliwert does not copy the documents.

Questions and answers

Who is the buyer?

Ruhr-Universität Bochum, Bochum, DE.

What is being procured (CPV)?

Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000).

Where is the work performed (NUTS)?

Bochum, Kreisfreie Stadt (DEA51).

What is the estimated value?

The notice states an estimated value of €1,024,000 excl. VAT.

Is it divided into lots?

No, the notice names a single lot.

Which procedure is used?

Competitive dialogue.

How do I submit a bid?

On the official notice or the portal it names. Inteliwert does not submit bids. Official notice

Am I eligible?

Inteliwert does not judge eligibility. The selection criteria are in the official notice. Official notice

Companies that might fit

Possible match based on public information

Companies Inteliwert knows from its sources, not the whole market. Inteliwert does not judge eligibility, fit or chances.

  • TESCAN GmbH

    Dortmund
    SME (from the award notice)
    • Won a contract in CPV group 380 (2026-09-24) Evidence · checked 9 Nov 2026
    • Seat in the same region as the place of performance Evidence · checked 9 Nov 2026

  • Pro Lux Sensorsysteme GmbH

    Sundern
    SME (from the award notice)New to public tenders
    • Won a contract in CPV group 380 (2026-09-29) Evidence · checked 9 Nov 2026
    • Seat in the same region as the place of performance Evidence · checked 9 Nov 2026

  • Beckman Coulter GmbH

    Krefeld
    SME (from the award notice)New to public tenders
    • Won a contract in CPV group 380 (2026-10-07) Evidence · checked 9 Nov 2026
    • Seat in the same federal state as the place of performance Evidence · checked 9 Nov 2026

  • Revvity (Germany) GmbH

    Hamburg
    SME (from the award notice)
    • Won a contract in CPV group 380 (2026-08-20) Evidence · checked 9 Nov 2026
    • Seat in the same country as the place of performance Evidence · checked 9 Nov 2026

  • Quantum Design GmbH

    Pfungstadt
    SME (from the award notice)
    • Won a contract in CPV group 380 (2026-09-28) Evidence · checked 9 Nov 2026
    • Seat in the same country as the place of performance Evidence · checked 9 Nov 2026

More from this buyer

Other published opportunities of this buyer in the indexed notices, open ones first.

Source

Publisher
Bekanntmachungsservice
Licence
CC0 1.0
Last checked
9 November 2026, 04:31 (UTC+01:00)

The official notice is authoritative. Inteliwert shows what the notice states and links to it.

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