System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) - PR1153448-2480-P
At a glance
Fraunhofer-Gesellschaft - Einkauf B12 is procuring Miscellaneous special-purpose machinery (CPV 42990000) in Dresden, Kreisfreie Stadt (DED21). Procedure type: Negotiated with prior publication of a call for competition / competitive with negotiation.
From the notice
System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1)
Key facts
Each fact is from the official notice, last checked 10 November 2026, 08:30 (UTC+01:00).
- Status
- OpenOfficial notice · checked 10 Nov 2026, 08:30 (UTC+01:00)
- Deadline
- No deadline in the noticeOfficial notice · checked 10 Nov 2026, 08:30 (UTC+01:00)
- Buyer
- Fraunhofer-Gesellschaft - Einkauf B12, München, DEOfficial notice · checked 10 Nov 2026, 08:30 (UTC+01:00)
- Place of performance
- Dresden, Kreisfreie Stadt (DED21)Official notice · checked 10 Nov 2026, 08:30 (UTC+01:00)
- Main CPV
- Miscellaneous special-purpose machinery (CPV 42990000)Official notice · checked 10 Nov 2026, 08:30 (UTC+01:00)
- Procedure
- Negotiated with prior publication of a call for competition / competitive with negotiationOfficial notice · checked 10 Nov 2026, 08:30 (UTC+01:00)
- Lots
- 1Official notice · checked 10 Nov 2026, 08:30 (UTC+01:00)
- First published
- 16 July 2026, 15:23 (UTC+02:00)Official notice · checked 10 Nov 2026, 08:30 (UTC+01:00)
Fact sheet

Lots (1)
Lot LOT-0000: System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) - PR1153448-2480-P
1 Stück System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) Die Spezifikation beschreibt die Anforderungen an ein vollautomatisches Prozessgerät, das für Plasmaätzprozesse auf Wafern mit einem Durchmesser von 300 mm eingesetzt werden soll. Die Systeme werden für die Bearbeitung von Silizium-CMOS-Wafern in einer Produktionsumgebung der Reinraumklasse 1000 (entspricht in etwa Klasse 6 nach EN ISO 14644-1) eingesetzt. Das neue Werkzeug soll zur Strukturierung von Strukturen mit hohem Aspektverhältnis in Silizium sowie in allen damit verbundenen erforderlichen Materialien (z. B. SiO₂, SiN) eingesetzt werden, um dieses Hauptziel zu erreichen. Optionale Positionen gemäß Technical Tender Specification.
Timeline
- 16 July 2026, 15:23 (UTC+02:00): Original notice Notice, version 01 (Contract or concession notice – standard regime). Official notice
Buyer and place
Buyer
Fraunhofer-Gesellschaft - Einkauf B12
München, DE
Place of performance
- Dresden, Kreisfreie Stadt (DED21)
Classification
CPV codes
- 42990000: Miscellaneous special-purpose machinery
NUTS regions
- DED21: Dresden, Kreisfreie Stadt
Official documents
Links go to the publisher. Inteliwert does not copy the documents.
Questions and answers
Who is the buyer?
Fraunhofer-Gesellschaft - Einkauf B12, München, DE.
What is being procured (CPV)?
Miscellaneous special-purpose machinery (CPV 42990000).
Where is the work performed (NUTS)?
Dresden, Kreisfreie Stadt (DED21).
Is it divided into lots?
No, the notice names a single lot.
Which procedure is used?
Negotiated with prior publication of a call for competition / competitive with negotiation.
How do I submit a bid?
On the official notice or the portal it names. Inteliwert does not submit bids. Official notice
Am I eligible?
Inteliwert does not judge eligibility. The selection criteria are in the official notice. Official notice
Companies that might fit
Possible match based on public information
Companies Inteliwert knows from its sources, not the whole market. Inteliwert does not judge eligibility, fit or chances.
HR Wallingford Limited
WallingfordSME (from the award notice)New to public tenders- SME (from the award notice)New to public tenders
SITEC Industrietechnologie GmbH
ChemnitzSME (from the award notice)New to public tenders- SME (from the award notice)
Funduino GmbH
NordhornSME (from the award notice)
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Source
- Publisher
- Bekanntmachungsservice
- Licence
- CC0 1.0
- Last checked
- 10 November 2026, 08:30 (UTC+01:00)
The official notice is authoritative. Inteliwert shows what the notice states and links to it.