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Clustertool for Ion Beam Etching of 300mm wafers

At a glance

Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. is procuring Miscellaneous general and special-purpose machinery (CPV 42900000) in Dresden, Kreisfreie Stadt (DED21). It has been awarded. Procedure type: Negotiated with prior publication of a call for competition / competitive with negotiation.

From the notice

The tender item is an ion beam etching process tool to be used for 300mm wafer fabrication at the FRAUNHOFER IPMS. The systems will be used for the processing of CMOS wafers in a cleanroom class 1000 (approximately class 6 EN ISO 14644-1) production environment. Therefore, it is necessary to fulfill require-ments regarding metal contamination and particle generation compatible with industry standards.

Key facts

Each fact is from the official notice, last checked 10 November 2026, 16:30 (UTC+01:00).

Status
AwardedOfficial notice · checked 10 Nov 2026, 16:30 (UTC+01:00)
Deadline
No deadline in the noticeOfficial notice · checked 10 Nov 2026, 16:30 (UTC+01:00)
Buyer
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V., Erlangen, DEOfficial notice · checked 10 Nov 2026, 16:30 (UTC+01:00)
Place of performance
Dresden, Kreisfreie Stadt (DED21)Official notice · checked 10 Nov 2026, 16:30 (UTC+01:00)
Main CPV
Miscellaneous general and special-purpose machinery (CPV 42900000)Official notice · checked 10 Nov 2026, 16:30 (UTC+01:00)
Procedure
Negotiated with prior publication of a call for competition / competitive with negotiationOfficial notice · checked 10 Nov 2026, 16:30 (UTC+01:00)
Lots
1Official notice · checked 10 Nov 2026, 16:30 (UTC+01:00)
First published
8 July 2026, 13:50 (UTC+02:00)Official notice · checked 10 Nov 2026, 16:30 (UTC+01:00)

Fact sheet

Inteliwert fact sheet: Clustertool for Ion Beam Etching of 300mm wafers — Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.. A product of Bandpey GmbH.
The key facts of this page as an image (PNG, 1600 × 900), made from the official notice. © Bandpey GmbH; terms of use. Download the fact sheet

Lots (1)

  1. Lot LOT-0001: Clustertool for Ion Beam Etching of 300mm wafers

    The tender item is an ion beam etching process tool to be used for 300mm wafer fabrication at the FRAUNHOFER IPMS. The systems will be used for the processing of CMOS wafers in a cleanroom class 1000 (approximately class 6 EN ISO 14644-1) production environment. Therefore, it is necessary to fulfill require-ments regarding metal contamination and particle generation compatible with industry standards.

    CPV
    Miscellaneous general and special-purpose machinery (CPV 42900000)
    Place
    Dresden, Kreisfreie Stadt (DED21)

Timeline

  1. 2 July 2026: Award. Winner: Scia Systems GmbH; Award value: €1 excl. VAT; Tenders received: 1; Lot LOT-0001.
  2. 8 July 2026, 13:50 (UTC+02:00): Award notice Notice, version 02 (Contract or concession award notice – standard regime). Official notice

Buyer and place

Buyer

Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Erlangen, DE

Place of performance

  • Dresden, Kreisfreie Stadt (DED21)

Other parties in the notice

  • Scia Systems GmbH (Tenderer), Chemnitz
  • Scia Systems GmbH (Winner), Chemnitz

Classification

CPV codes

  • 42900000: Miscellaneous general and special-purpose machinery

NUTS regions

  • DED21: Dresden, Kreisfreie Stadt

Official documents

No documents found in the indexed notice.

Questions and answers

Who is the buyer?

Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V., Erlangen, DE.

What is being procured (CPV)?

Miscellaneous general and special-purpose machinery (CPV 42900000).

Where is the work performed (NUTS)?

Dresden, Kreisfreie Stadt (DED21).

Is it divided into lots?

No, the notice names a single lot.

Which procedure is used?

Negotiated with prior publication of a call for competition / competitive with negotiation.

How do I submit a bid?

On the official notice or the portal it names. Inteliwert does not submit bids. Official notice

Am I eligible?

Inteliwert does not judge eligibility. The selection criteria are in the official notice. Official notice

More from this buyer

Other published opportunities of this buyer in the indexed notices, open ones first.

Source

Publisher
Bekanntmachungsservice
Licence
CC0 1.0
Last checked
10 November 2026, 16:30 (UTC+01:00)

The official notice is authoritative. Inteliwert shows what the notice states and links to it.

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